PhotriX Direct Sapphire Lightpipe Configuration

Our most accurate pyrometer, the PhotriX Series has the industry’s best signal-to-noise ratio allowing lower temperatures to be measured with unmatched precision for control of high-value processes and research applications. This configuration of our Photrix series uses a sapphire optical rod (so called “lightpipe”) as the optics to collect the infrared radiation from the target. The advantages of the lightpipe optics is to provide lower temperature measurement and the ability to easily integrate into vacuum reactors often used for advanced material deposition (growth) and etch (removal) processes.

The Photrix with lightpipe optics is offered in 5 spectral response (wavelength) versions and has the following features:

• Low Temperature Capability (see chart below for details)
  • 30 to 670 °C with 700-1650nm spectral response
  • 70 to 110 °C with 1550nm spectral response
  • 210 to 1300 °C with 900nm spectral response
  • 220 to 1300 °C with 880nm spectral response
  • 400 to 1500 °C with 650nm spectral response
• Fast Response (1ms)
• Accuracy of +/- 1.5 °C or 0.15% of reading
• Precision of 0.01 °C (see TN-828)

Available options include analog output (user selectable 4-20mA or 0-10V) and multi-channel interface modules allowing up to eight (8) sensors to be integrated into a single digital signal with parallel analog outputs. Standard system includes all necessary electrical cables, power supply, PC interface software and documentation/calibration.

Typical Applications:

• Semiconductor
• Thin-Film CIGS Solar deposition
• Thin-Film Amorphous Silicon deposition 
• CZ Crystal Growth